JPH0115120Y2 - - Google Patents
Info
- Publication number
- JPH0115120Y2 JPH0115120Y2 JP9689283U JP9689283U JPH0115120Y2 JP H0115120 Y2 JPH0115120 Y2 JP H0115120Y2 JP 9689283 U JP9689283 U JP 9689283U JP 9689283 U JP9689283 U JP 9689283U JP H0115120 Y2 JPH0115120 Y2 JP H0115120Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- cathode
- hollow cathode
- hollow
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Gas-Filled Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9689283U JPS605100U (ja) | 1983-06-23 | 1983-06-23 | ホロ−カソ−ド放電型プラズマ発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9689283U JPS605100U (ja) | 1983-06-23 | 1983-06-23 | ホロ−カソ−ド放電型プラズマ発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS605100U JPS605100U (ja) | 1985-01-14 |
| JPH0115120Y2 true JPH0115120Y2 (en]) | 1989-05-08 |
Family
ID=30230714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9689283U Granted JPS605100U (ja) | 1983-06-23 | 1983-06-23 | ホロ−カソ−ド放電型プラズマ発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605100U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6030867B2 (ja) * | 2011-06-24 | 2016-11-24 | 国立大学法人佐賀大学 | プラズマ処理装置 |
-
1983
- 1983-06-23 JP JP9689283U patent/JPS605100U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605100U (ja) | 1985-01-14 |
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